6/24/2010	8:28:39 AM	Recipe started at 8:28 AM
6/24/2010	8:28:39 AM	Helium valve closed
6/24/2010	8:28:39 AM	BCl3 valve closed
6/24/2010	8:28:39 AM	PH3 valve closed
6/24/2010	8:28:39 AM	SiCl4 pre valve closed
6/24/2010	8:28:39 AM	SiCl4 post valve closed
6/24/2010	8:28:39 AM	Main Vac valve closed
6/24/2010	8:28:39 AM	Bypass valve closed
6/24/2010	8:28:39 AM	Bubbler valve closed
6/24/2010	8:28:39 AM	H2 valve opened
6/24/2010	8:28:39 AM	Helium MFC set to  0.000000
6/24/2010	8:28:39 AM	H2 MFC set to  500.000000
6/24/2010	8:28:39 AM	BCl3 MFC set to  0.000000
6/24/2010	8:28:39 AM	PHl3 MFC set to  0.000000
6/24/2010	8:28:39 AM	SiCl4 MFC set to  0.000000
6/24/2010	8:28:39 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	8:28:39 AM	Tube furnace set to 0
6/24/2010	8:30:01 AM	Helium valve closed
6/24/2010	8:30:01 AM	BCl3 valve closed
6/24/2010	8:30:01 AM	PH3 valve closed
6/24/2010	8:30:01 AM	SiCl4 pre valve closed
6/24/2010	8:30:01 AM	SiCl4 post valve closed
6/24/2010	8:30:01 AM	Main Vac valve closed
6/24/2010	8:30:01 AM	Bypass valve closed
6/24/2010	8:30:01 AM	H2 valve opened
6/24/2010	8:30:01 AM	Bubbler valve opened
6/24/2010	8:30:01 AM	Helium MFC set to  0.000000
6/24/2010	8:30:01 AM	H2 MFC set to  500.000000
6/24/2010	8:30:01 AM	BCl3 MFC set to  0.000000
6/24/2010	8:30:01 AM	PHl3 MFC set to  0.000000
6/24/2010	8:30:01 AM	SiCl4 MFC set to  0.000000
6/24/2010	8:30:01 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	8:30:02 AM	Tube furnace set to 1000
6/24/2010	8:50:02 AM	Helium valve closed
6/24/2010	8:50:02 AM	BCl3 valve closed
6/24/2010	8:50:02 AM	Main Vac valve closed
6/24/2010	8:50:02 AM	Bypass valve closed
6/24/2010	8:50:02 AM	H2 valve opened
6/24/2010	8:50:02 AM	PH3 valve opened
6/24/2010	8:50:02 AM	SiCl4 pre valve opened
6/24/2010	8:50:02 AM	SiCl4 post valve opened
6/24/2010	8:50:02 AM	Bubbler valve opened
6/24/2010	8:50:02 AM	Helium MFC set to  0.000000
6/24/2010	8:50:02 AM	H2 MFC set to  500.000000
6/24/2010	8:50:02 AM	BCl3 MFC set to  0.000000
6/24/2010	8:50:02 AM	PHl3 MFC set to  0.200000
6/24/2010	8:50:02 AM	SiCl4 MFC set to  50.000000
6/24/2010	8:50:02 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	8:50:02 AM	Tube furnace set to 1000
6/24/2010	9:05:02 AM	H2 valve closed
6/24/2010	9:05:02 AM	BCl3 valve closed
6/24/2010	9:05:02 AM	PH3 valve closed
6/24/2010	9:05:02 AM	SiCl4 pre valve closed
6/24/2010	9:05:02 AM	SiCl4 post valve closed
6/24/2010	9:05:02 AM	Main Vac valve closed
6/24/2010	9:05:02 AM	Bypass valve closed
6/24/2010	9:05:02 AM	Helium valve opened
6/24/2010	9:05:02 AM	Bubbler valve opened
6/24/2010	9:05:02 AM	Helium MFC set to  500.000000
6/24/2010	9:05:02 AM	H2 MFC set to  0.000000
6/24/2010	9:05:02 AM	BCl3 MFC set to  0.000000
6/24/2010	9:05:02 AM	PHl3 MFC set to  0.000000
6/24/2010	9:05:02 AM	SiCl4 MFC set to  0.000000
6/24/2010	9:05:02 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	9:05:02 AM	Tube furnace set to 0
6/24/2010	9:23:50 AM	Helium valve closed
6/24/2010	9:23:50 AM	H2 valve closed
6/24/2010	9:23:50 AM	BCl3 valve closed
6/24/2010	9:23:50 AM	PH3 valve closed
6/24/2010	9:23:50 AM	SiCl4 pre valve closed
6/24/2010	9:23:50 AM	SiCl4 post valve closed
6/24/2010	9:23:50 AM	Main Vac valve closed
6/24/2010	9:23:50 AM	Bypass valve closed
6/24/2010	9:23:50 AM	Bubbler valve closed
6/24/2010	9:23:50 AM	Helium MFC set to  0.000000
6/24/2010	9:23:50 AM	H2 MFC set to  0.000000
6/24/2010	9:23:50 AM	BCl3 MFC set to  0.000000
6/24/2010	9:23:50 AM	PHl3 MFC set to  0.000000
6/24/2010	9:23:50 AM	SiCl4 MFC set to  0.000000
6/24/2010	9:23:50 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	9:23:51 AM	Tube furnace set to 0
6/24/2010	9:23:51 AM	Run finished at 9:23 AM
6/24/2010	9:23:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/24/2010	9:23:57 AM	Recipe started at 9:23 AM
6/24/2010	9:23:57 AM	H2 valve closed
6/24/2010	9:23:57 AM	BCl3 valve closed
6/24/2010	9:23:57 AM	PH3 valve closed
6/24/2010	9:23:57 AM	SiCl4 pre valve closed
6/24/2010	9:23:57 AM	SiCl4 post valve closed
6/24/2010	9:23:57 AM	Main Vac valve closed
6/24/2010	9:23:57 AM	Bypass valve closed
6/24/2010	9:23:57 AM	Bubbler valve closed
6/24/2010	9:23:57 AM	Helium valve opened
6/24/2010	9:23:57 AM	Helium MFC set to  500.000000
6/24/2010	9:23:57 AM	H2 MFC set to  0.000000
6/24/2010	9:23:57 AM	BCl3 MFC set to  0.000000
6/24/2010	9:23:57 AM	PHl3 MFC set to  0.000000
6/24/2010	9:23:57 AM	SiCl4 MFC set to  0.000000
6/24/2010	9:23:57 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	9:23:57 AM	Tube furnace set to 0
6/24/2010	9:23:57 AM	Helium valve closed
6/24/2010	9:23:57 AM	H2 valve closed
6/24/2010	9:23:57 AM	BCl3 valve closed
6/24/2010	9:23:57 AM	PH3 valve closed
6/24/2010	9:23:57 AM	SiCl4 pre valve closed
6/24/2010	9:23:57 AM	SiCl4 post valve closed
6/24/2010	9:23:57 AM	Main Vac valve closed
6/24/2010	9:23:57 AM	Bypass valve closed
6/24/2010	9:23:57 AM	Bubbler valve closed
6/24/2010	9:23:57 AM	Helium MFC set to  0.000000
6/24/2010	9:23:57 AM	H2 MFC set to  0.000000
6/24/2010	9:23:57 AM	BCl3 MFC set to  0.000000
6/24/2010	9:23:57 AM	PHl3 MFC set to  0.000000
6/24/2010	9:23:57 AM	SiCl4 MFC set to  0.000000
6/24/2010	9:23:57 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	9:23:57 AM	Tube furnace set to 0
6/24/2010	9:23:58 AM	Run finished at 9:23 AM
6/24/2010	9:23:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/24/2010	9:39:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	9:39:42 AM	Recipe started at 9:39 AM
6/24/2010	9:39:42 AM	Helium valve closed
6/24/2010	9:39:42 AM	H2 valve closed
6/24/2010	9:39:42 AM	BCl3 valve closed
6/24/2010	9:39:42 AM	PH3 valve closed
6/24/2010	9:39:42 AM	SiCl4 pre valve closed
6/24/2010	9:39:42 AM	SiCl4 post valve closed
6/24/2010	9:39:42 AM	Main Vac valve closed
6/24/2010	9:39:42 AM	Bubbler valve closed
6/24/2010	9:39:42 AM	Bypass valve opened
6/24/2010	9:39:42 AM	Helium MFC set to  0.000000
6/24/2010	9:39:42 AM	H2 MFC set to  0.000000
6/24/2010	9:39:42 AM	BCl3 MFC set to  0.000000
6/24/2010	9:39:42 AM	PHl3 MFC set to  0.000000
6/24/2010	9:39:42 AM	SiCl4 MFC set to  0.000000
6/24/2010	9:39:42 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	9:39:42 AM	Tube furnace set to 0
6/24/2010	9:40:31 AM	Helium valve closed
6/24/2010	9:40:31 AM	H2 valve closed
6/24/2010	9:40:31 AM	BCl3 valve closed
6/24/2010	9:40:31 AM	PH3 valve closed
6/24/2010	9:40:31 AM	SiCl4 pre valve closed
6/24/2010	9:40:31 AM	SiCl4 post valve closed
6/24/2010	9:40:31 AM	Bubbler valve closed
6/24/2010	9:40:31 AM	Main Vac valve opened
6/24/2010	9:40:31 AM	Bypass valve opened
6/24/2010	9:40:31 AM	Helium MFC set to  0.000000
6/24/2010	9:40:31 AM	H2 MFC set to  0.000000
6/24/2010	9:40:31 AM	BCl3 MFC set to  0.000000
6/24/2010	9:40:31 AM	PHl3 MFC set to  0.000000
6/24/2010	9:40:31 AM	SiCl4 MFC set to  0.000000
6/24/2010	9:40:31 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	9:40:31 AM	Tube furnace set to 0
6/24/2010	9:40:32 AM	Run finished at 9:40 AM
6/24/2010	9:40:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	9:41:07 AM	Helium MFC set to  100.000000
6/24/2010	9:41:10 AM	Helium valve opened
6/24/2010	9:41:14 AM	Helium MFC set to  500.000000
6/24/2010	9:46:15 AM	Helium valve closed
6/24/2010	9:46:52 AM	Helium MFC set to  100.000000
6/24/2010	9:46:53 AM	Helium valve opened
6/24/2010	9:46:56 AM	Helium MFC set to  500.000000
6/24/2010	9:51:34 AM	Helium valve closed
6/24/2010	9:51:49 AM	Helium MFC set to  100.000000
6/24/2010	9:52:14 AM	Helium valve opened
6/24/2010	9:52:19 AM	Helium MFC set to  500.000000
6/24/2010	9:58:31 AM	Helium valve closed
6/24/2010	9:58:34 AM	Helium MFC set to  100.000000
6/24/2010	9:59:11 AM	Helium valve opened
6/24/2010	9:59:17 AM	Helium MFC set to  500.000000
6/24/2010	10:05:49 AM	Helium valve closed
6/24/2010	10:05:54 AM	Helium MFC set to  100.000000
6/24/2010	10:06:42 AM	Helium valve opened
6/24/2010	10:06:48 AM	Helium MFC set to  500.000000
6/24/2010	10:11:03 AM	Helium valve closed
6/24/2010	10:11:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	10:12:00 AM	Recipe started at 10:11 AM
6/24/2010	10:12:00 AM	Helium valve closed
6/24/2010	10:12:00 AM	H2 valve closed
6/24/2010	10:12:00 AM	BCl3 valve closed
6/24/2010	10:12:00 AM	PH3 valve closed
6/24/2010	10:12:00 AM	SiCl4 pre valve closed
6/24/2010	10:12:00 AM	SiCl4 post valve closed
6/24/2010	10:12:00 AM	Main Vac valve closed
6/24/2010	10:12:00 AM	Bubbler valve closed
6/24/2010	10:12:00 AM	Bypass valve opened
6/24/2010	10:12:00 AM	Helium MFC set to  0.000000
6/24/2010	10:12:00 AM	H2 MFC set to  0.000000
6/24/2010	10:12:00 AM	BCl3 MFC set to  0.000000
6/24/2010	10:12:00 AM	PHl3 MFC set to  0.000000
6/24/2010	10:12:00 AM	SiCl4 MFC set to  0.000000
6/24/2010	10:12:00 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:12:00 AM	Tube furnace set to 0
6/24/2010	10:12:00 AM	Helium valve closed
6/24/2010	10:12:00 AM	H2 valve closed
6/24/2010	10:12:00 AM	BCl3 valve closed
6/24/2010	10:12:00 AM	PH3 valve closed
6/24/2010	10:12:00 AM	SiCl4 pre valve closed
6/24/2010	10:12:00 AM	SiCl4 post valve closed
6/24/2010	10:12:00 AM	Bubbler valve closed
6/24/2010	10:12:00 AM	Main Vac valve opened
6/24/2010	10:12:00 AM	Bypass valve opened
6/24/2010	10:12:00 AM	Helium MFC set to  0.000000
6/24/2010	10:12:00 AM	H2 MFC set to  0.000000
6/24/2010	10:12:00 AM	BCl3 MFC set to  0.000000
6/24/2010	10:12:00 AM	PHl3 MFC set to  0.000000
6/24/2010	10:12:00 AM	SiCl4 MFC set to  0.000000
6/24/2010	10:12:00 AM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:12:00 AM	Tube furnace set to 0
6/24/2010	10:12:00 AM	Run finished at 10:12 AM
6/24/2010	10:12:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	1:31:33 PM	Recipe started at 1:31 PM
6/24/2010	1:31:33 PM	Helium valve closed
6/24/2010	1:31:33 PM	BCl3 valve closed
6/24/2010	1:31:33 PM	PH3 valve closed
6/24/2010	1:31:33 PM	SiCl4 pre valve closed
6/24/2010	1:31:33 PM	SiCl4 post valve closed
6/24/2010	1:31:33 PM	Main Vac valve closed
6/24/2010	1:31:33 PM	Bypass valve closed
6/24/2010	1:31:33 PM	Bubbler valve closed
6/24/2010	1:31:33 PM	H2 valve opened
6/24/2010	1:31:33 PM	Helium MFC set to  0.000000
6/24/2010	1:31:33 PM	H2 MFC set to  500.000000
6/24/2010	1:31:33 PM	BCl3 MFC set to  0.000000
6/24/2010	1:31:33 PM	PHl3 MFC set to  0.000000
6/24/2010	1:31:33 PM	SiCl4 MFC set to  0.000000
6/24/2010	1:31:33 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	1:31:33 PM	Tube furnace set to 1000
6/24/2010	1:32:55 PM	Helium valve closed
6/24/2010	1:32:55 PM	BCl3 valve closed
6/24/2010	1:32:55 PM	PH3 valve closed
6/24/2010	1:32:55 PM	SiCl4 pre valve closed
6/24/2010	1:32:55 PM	SiCl4 post valve closed
6/24/2010	1:32:55 PM	Main Vac valve closed
6/24/2010	1:32:55 PM	Bypass valve closed
6/24/2010	1:32:55 PM	H2 valve opened
6/24/2010	1:32:55 PM	Bubbler valve opened
6/24/2010	1:32:55 PM	Helium MFC set to  0.000000
6/24/2010	1:32:55 PM	H2 MFC set to  500.000000
6/24/2010	1:32:55 PM	BCl3 MFC set to  0.000000
6/24/2010	1:32:55 PM	PHl3 MFC set to  0.000000
6/24/2010	1:32:55 PM	SiCl4 MFC set to  0.000000
6/24/2010	1:32:55 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	1:32:55 PM	Tube furnace set to 1000
6/24/2010	1:52:55 PM	Helium valve closed
6/24/2010	1:52:55 PM	PH3 valve closed
6/24/2010	1:52:55 PM	Main Vac valve closed
6/24/2010	1:52:55 PM	Bypass valve closed
6/24/2010	1:52:55 PM	H2 valve opened
6/24/2010	1:52:55 PM	BCl3 valve opened
6/24/2010	1:52:55 PM	SiCl4 pre valve opened
6/24/2010	1:52:55 PM	SiCl4 post valve opened
6/24/2010	1:52:55 PM	Bubbler valve opened
6/24/2010	1:52:55 PM	Helium MFC set to  0.000000
6/24/2010	1:52:55 PM	H2 MFC set to  500.000000
6/24/2010	1:52:55 PM	BCl3 MFC set to  35.000000
6/24/2010	1:52:55 PM	PHl3 MFC set to  0.000000
6/24/2010	1:52:55 PM	SiCl4 MFC set to  50.000000
6/24/2010	1:52:55 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	1:52:55 PM	Tube furnace set to 1000
6/24/2010	2:07:55 PM	Helium valve closed
6/24/2010	2:07:55 PM	BCl3 valve closed
6/24/2010	2:07:55 PM	PH3 valve closed
6/24/2010	2:07:55 PM	SiCl4 pre valve closed
6/24/2010	2:07:55 PM	SiCl4 post valve closed
6/24/2010	2:07:55 PM	Main Vac valve closed
6/24/2010	2:07:55 PM	Bypass valve closed
6/24/2010	2:07:55 PM	H2 valve opened
6/24/2010	2:07:55 PM	Bubbler valve opened
6/24/2010	2:07:55 PM	Helium MFC set to  0.000000
6/24/2010	2:07:55 PM	H2 MFC set to  500.000000
6/24/2010	2:07:55 PM	BCl3 MFC set to  0.000000
6/24/2010	2:07:55 PM	PHl3 MFC set to  0.000000
6/24/2010	2:07:55 PM	SiCl4 MFC set to  0.000000
6/24/2010	2:07:55 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	2:07:55 PM	Tube furnace set to 750
6/24/2010	2:27:55 PM	H2 valve closed
6/24/2010	2:27:55 PM	BCl3 valve closed
6/24/2010	2:27:55 PM	PH3 valve closed
6/24/2010	2:27:55 PM	SiCl4 pre valve closed
6/24/2010	2:27:55 PM	SiCl4 post valve closed
6/24/2010	2:27:55 PM	Main Vac valve closed
6/24/2010	2:27:55 PM	Bypass valve closed
6/24/2010	2:27:55 PM	Helium valve opened
6/24/2010	2:27:55 PM	Bubbler valve opened
6/24/2010	2:27:55 PM	Helium MFC set to  500.000000
6/24/2010	2:27:55 PM	H2 MFC set to  0.000000
6/24/2010	2:27:55 PM	BCl3 MFC set to  0.000000
6/24/2010	2:27:55 PM	PHl3 MFC set to  0.000000
6/24/2010	2:27:55 PM	SiCl4 MFC set to  0.000000
6/24/2010	2:27:55 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	2:27:55 PM	Tube furnace set to 0
6/24/2010	2:41:06 PM	Run aborted at 2:41 PM
6/24/2010	2:41:06 PM	Helium valve closed
6/24/2010	2:41:06 PM	H2 valve closed
6/24/2010	2:41:06 PM	BCl3 valve closed
6/24/2010	2:41:06 PM	PH3 valve closed
6/24/2010	2:41:06 PM	SiCl4 pre valve closed
6/24/2010	2:41:06 PM	SiCl4 post valve closed
6/24/2010	2:41:06 PM	Bypass valve closed
6/24/2010	2:41:06 PM	Main Vac valve closed
6/24/2010	2:41:06 PM	Bubbler valve closed
6/24/2010	2:41:06 PM	Helium MFC set to  0.000000
6/24/2010	2:41:06 PM	H2 MFC set to  0.000000
6/24/2010	2:41:06 PM	BCl3 MFC set to  0.000000
6/24/2010	2:41:06 PM	PHl3 MFC set to  0.000000
6/24/2010	2:41:06 PM	SiCl4 MFC set to  0.000000
6/24/2010	2:41:07 PM	Tube furnace set to 0
6/24/2010	2:54:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	2:54:18 PM	Recipe started at 2:54 PM
6/24/2010	2:54:18 PM	Helium valve closed
6/24/2010	2:54:18 PM	H2 valve closed
6/24/2010	2:54:18 PM	BCl3 valve closed
6/24/2010	2:54:18 PM	PH3 valve closed
6/24/2010	2:54:18 PM	SiCl4 pre valve closed
6/24/2010	2:54:18 PM	SiCl4 post valve closed
6/24/2010	2:54:18 PM	Main Vac valve closed
6/24/2010	2:54:18 PM	Bubbler valve closed
6/24/2010	2:54:18 PM	Bypass valve opened
6/24/2010	2:54:18 PM	Helium MFC set to  0.000000
6/24/2010	2:54:18 PM	H2 MFC set to  0.000000
6/24/2010	2:54:18 PM	BCl3 MFC set to  0.000000
6/24/2010	2:54:18 PM	PHl3 MFC set to  0.000000
6/24/2010	2:54:18 PM	SiCl4 MFC set to  0.000000
6/24/2010	2:54:18 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	2:54:18 PM	Tube furnace set to 0
6/24/2010	2:55:07 PM	Helium valve closed
6/24/2010	2:55:07 PM	H2 valve closed
6/24/2010	2:55:07 PM	BCl3 valve closed
6/24/2010	2:55:07 PM	PH3 valve closed
6/24/2010	2:55:07 PM	SiCl4 pre valve closed
6/24/2010	2:55:07 PM	SiCl4 post valve closed
6/24/2010	2:55:07 PM	Bubbler valve closed
6/24/2010	2:55:07 PM	Main Vac valve opened
6/24/2010	2:55:07 PM	Bypass valve opened
6/24/2010	2:55:07 PM	Helium MFC set to  0.000000
6/24/2010	2:55:07 PM	H2 MFC set to  0.000000
6/24/2010	2:55:07 PM	BCl3 MFC set to  0.000000
6/24/2010	2:55:07 PM	PHl3 MFC set to  0.000000
6/24/2010	2:55:07 PM	SiCl4 MFC set to  0.000000
6/24/2010	2:55:07 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	2:55:07 PM	Tube furnace set to 0
6/24/2010	2:55:07 PM	Run finished at 2:55 PM
6/24/2010	2:55:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	2:55:39 PM	Helium MFC set to  100.000000
6/24/2010	2:55:43 PM	Helium valve opened
6/24/2010	2:55:50 PM	Helium MFC set to  500.000000
6/24/2010	2:57:07 PM	Helium valve closed
6/24/2010	2:57:25 PM	Helium valve opened
6/24/2010	3:05:37 PM	Helium valve closed
6/24/2010	3:06:04 PM	Helium valve opened
6/24/2010	3:21:05 PM	Helium valve closed
6/24/2010	3:21:44 PM	Helium valve opened
6/24/2010	3:24:27 PM	Helium valve closed
6/24/2010	3:25:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	3:25:07 PM	Recipe started at 3:25 PM
6/24/2010	3:25:07 PM	Helium valve closed
6/24/2010	3:25:07 PM	H2 valve closed
6/24/2010	3:25:07 PM	BCl3 valve closed
6/24/2010	3:25:07 PM	PH3 valve closed
6/24/2010	3:25:07 PM	SiCl4 pre valve closed
6/24/2010	3:25:07 PM	SiCl4 post valve closed
6/24/2010	3:25:07 PM	Main Vac valve closed
6/24/2010	3:25:07 PM	Bubbler valve closed
6/24/2010	3:25:07 PM	Bypass valve opened
6/24/2010	3:25:07 PM	Helium MFC set to  0.000000
6/24/2010	3:25:07 PM	H2 MFC set to  0.000000
6/24/2010	3:25:07 PM	BCl3 MFC set to  0.000000
6/24/2010	3:25:07 PM	PHl3 MFC set to  0.000000
6/24/2010	3:25:07 PM	SiCl4 MFC set to  0.000000
6/24/2010	3:25:07 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	3:25:07 PM	Tube furnace set to 0
6/24/2010	3:25:07 PM	Helium valve closed
6/24/2010	3:25:07 PM	H2 valve closed
6/24/2010	3:25:07 PM	BCl3 valve closed
6/24/2010	3:25:07 PM	PH3 valve closed
6/24/2010	3:25:07 PM	SiCl4 pre valve closed
6/24/2010	3:25:07 PM	SiCl4 post valve closed
6/24/2010	3:25:07 PM	Bubbler valve closed
6/24/2010	3:25:07 PM	Main Vac valve opened
6/24/2010	3:25:07 PM	Bypass valve opened
6/24/2010	3:25:07 PM	Helium MFC set to  0.000000
6/24/2010	3:25:07 PM	H2 MFC set to  0.000000
6/24/2010	3:25:07 PM	BCl3 MFC set to  0.000000
6/24/2010	3:25:07 PM	PHl3 MFC set to  0.000000
6/24/2010	3:25:07 PM	SiCl4 MFC set to  0.000000
6/24/2010	3:25:07 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	3:25:08 PM	Tube furnace set to 0
6/24/2010	3:25:08 PM	Run finished at 3:25 PM
6/24/2010	3:25:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	6:02:46 PM	Recipe started at 6:02 PM
6/24/2010	6:02:46 PM	Helium valve closed
6/24/2010	6:02:46 PM	BCl3 valve closed
6/24/2010	6:02:46 PM	PH3 valve closed
6/24/2010	6:02:46 PM	SiCl4 pre valve closed
6/24/2010	6:02:46 PM	SiCl4 post valve closed
6/24/2010	6:02:46 PM	Main Vac valve closed
6/24/2010	6:02:46 PM	Bypass valve closed
6/24/2010	6:02:46 PM	Bubbler valve closed
6/24/2010	6:02:46 PM	H2 valve opened
6/24/2010	6:02:46 PM	Helium MFC set to  0.000000
6/24/2010	6:02:46 PM	H2 MFC set to  500.000000
6/24/2010	6:02:46 PM	BCl3 MFC set to  0.000000
6/24/2010	6:02:46 PM	PHl3 MFC set to  0.000000
6/24/2010	6:02:46 PM	SiCl4 MFC set to  0.000000
6/24/2010	6:02:46 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	6:02:46 PM	Tube furnace set to 1000
6/24/2010	6:04:08 PM	Helium valve closed
6/24/2010	6:04:08 PM	BCl3 valve closed
6/24/2010	6:04:08 PM	PH3 valve closed
6/24/2010	6:04:08 PM	SiCl4 pre valve closed
6/24/2010	6:04:08 PM	SiCl4 post valve closed
6/24/2010	6:04:08 PM	Main Vac valve closed
6/24/2010	6:04:08 PM	Bypass valve closed
6/24/2010	6:04:08 PM	H2 valve opened
6/24/2010	6:04:08 PM	Bubbler valve opened
6/24/2010	6:04:08 PM	Helium MFC set to  0.000000
6/24/2010	6:04:08 PM	H2 MFC set to  500.000000
6/24/2010	6:04:08 PM	BCl3 MFC set to  0.000000
6/24/2010	6:04:08 PM	PHl3 MFC set to  0.000000
6/24/2010	6:04:08 PM	SiCl4 MFC set to  0.000000
6/24/2010	6:04:08 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	6:04:08 PM	Tube furnace set to 1000
6/24/2010	6:24:08 PM	Helium valve closed
6/24/2010	6:24:08 PM	PH3 valve closed
6/24/2010	6:24:08 PM	Main Vac valve closed
6/24/2010	6:24:08 PM	Bypass valve closed
6/24/2010	6:24:08 PM	H2 valve opened
6/24/2010	6:24:08 PM	BCl3 valve opened
6/24/2010	6:24:08 PM	SiCl4 pre valve opened
6/24/2010	6:24:08 PM	SiCl4 post valve opened
6/24/2010	6:24:08 PM	Bubbler valve opened
6/24/2010	6:24:08 PM	Helium MFC set to  0.000000
6/24/2010	6:24:08 PM	H2 MFC set to  500.000000
6/24/2010	6:24:08 PM	BCl3 MFC set to  35.000000
6/24/2010	6:24:08 PM	PHl3 MFC set to  0.000000
6/24/2010	6:24:08 PM	SiCl4 MFC set to  50.000000
6/24/2010	6:24:08 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	6:24:08 PM	Tube furnace set to 1000
6/24/2010	6:44:08 PM	Helium valve closed
6/24/2010	6:44:08 PM	BCl3 valve closed
6/24/2010	6:44:08 PM	PH3 valve closed
6/24/2010	6:44:08 PM	SiCl4 pre valve closed
6/24/2010	6:44:08 PM	SiCl4 post valve closed
6/24/2010	6:44:08 PM	Main Vac valve closed
6/24/2010	6:44:08 PM	Bypass valve closed
6/24/2010	6:44:08 PM	H2 valve opened
6/24/2010	6:44:08 PM	Bubbler valve opened
6/24/2010	6:44:08 PM	Helium MFC set to  0.000000
6/24/2010	6:44:08 PM	H2 MFC set to  500.000000
6/24/2010	6:44:08 PM	BCl3 MFC set to  0.000000
6/24/2010	6:44:08 PM	PHl3 MFC set to  0.000000
6/24/2010	6:44:08 PM	SiCl4 MFC set to  0.000000
6/24/2010	6:44:08 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	6:44:08 PM	Tube furnace set to 750
6/24/2010	7:04:08 PM	H2 valve closed
6/24/2010	7:04:08 PM	BCl3 valve closed
6/24/2010	7:04:08 PM	PH3 valve closed
6/24/2010	7:04:08 PM	SiCl4 pre valve closed
6/24/2010	7:04:08 PM	SiCl4 post valve closed
6/24/2010	7:04:08 PM	Main Vac valve closed
6/24/2010	7:04:08 PM	Bypass valve closed
6/24/2010	7:04:08 PM	Helium valve opened
6/24/2010	7:04:08 PM	Bubbler valve opened
6/24/2010	7:04:08 PM	Helium MFC set to  500.000000
6/24/2010	7:04:08 PM	H2 MFC set to  0.000000
6/24/2010	7:04:08 PM	BCl3 MFC set to  0.000000
6/24/2010	7:04:08 PM	PHl3 MFC set to  0.000000
6/24/2010	7:04:08 PM	SiCl4 MFC set to  0.000000
6/24/2010	7:04:08 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	7:04:08 PM	Tube furnace set to 0
6/24/2010	7:13:10 PM	Run aborted at 7:13 PM
6/24/2010	7:13:10 PM	Helium valve closed
6/24/2010	7:13:10 PM	H2 valve closed
6/24/2010	7:13:10 PM	BCl3 valve closed
6/24/2010	7:13:10 PM	PH3 valve closed
6/24/2010	7:13:10 PM	SiCl4 pre valve closed
6/24/2010	7:13:10 PM	SiCl4 post valve closed
6/24/2010	7:13:10 PM	Bypass valve closed
6/24/2010	7:13:10 PM	Main Vac valve closed
6/24/2010	7:13:10 PM	Bubbler valve closed
6/24/2010	7:13:10 PM	Helium MFC set to  0.000000
6/24/2010	7:13:10 PM	H2 MFC set to  0.000000
6/24/2010	7:13:10 PM	BCl3 MFC set to  0.000000
6/24/2010	7:13:10 PM	PHl3 MFC set to  0.000000
6/24/2010	7:13:10 PM	SiCl4 MFC set to  0.000000
6/24/2010	7:13:10 PM	Tube furnace set to 0
6/24/2010	7:41:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	7:41:50 PM	Recipe started at 7:41 PM
6/24/2010	7:41:50 PM	Helium valve closed
6/24/2010	7:41:50 PM	H2 valve closed
6/24/2010	7:41:50 PM	BCl3 valve closed
6/24/2010	7:41:50 PM	PH3 valve closed
6/24/2010	7:41:50 PM	SiCl4 pre valve closed
6/24/2010	7:41:50 PM	SiCl4 post valve closed
6/24/2010	7:41:50 PM	Main Vac valve closed
6/24/2010	7:41:50 PM	Bubbler valve closed
6/24/2010	7:41:50 PM	Bypass valve opened
6/24/2010	7:41:50 PM	Helium MFC set to  0.000000
6/24/2010	7:41:50 PM	H2 MFC set to  0.000000
6/24/2010	7:41:50 PM	BCl3 MFC set to  0.000000
6/24/2010	7:41:50 PM	PHl3 MFC set to  0.000000
6/24/2010	7:41:50 PM	SiCl4 MFC set to  0.000000
6/24/2010	7:41:50 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	7:41:50 PM	Tube furnace set to 0
6/24/2010	7:42:40 PM	Helium valve closed
6/24/2010	7:42:40 PM	H2 valve closed
6/24/2010	7:42:40 PM	BCl3 valve closed
6/24/2010	7:42:40 PM	PH3 valve closed
6/24/2010	7:42:40 PM	SiCl4 pre valve closed
6/24/2010	7:42:40 PM	SiCl4 post valve closed
6/24/2010	7:42:40 PM	Bubbler valve closed
6/24/2010	7:42:40 PM	Main Vac valve opened
6/24/2010	7:42:40 PM	Bypass valve opened
6/24/2010	7:42:40 PM	Helium MFC set to  0.000000
6/24/2010	7:42:40 PM	H2 MFC set to  0.000000
6/24/2010	7:42:40 PM	BCl3 MFC set to  0.000000
6/24/2010	7:42:40 PM	PHl3 MFC set to  0.000000
6/24/2010	7:42:40 PM	SiCl4 MFC set to  0.000000
6/24/2010	7:42:40 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	7:42:40 PM	Tube furnace set to 0
6/24/2010	7:42:40 PM	Run finished at 7:42 PM
6/24/2010	7:42:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	7:43:59 PM	Helium MFC set to  100.000000
6/24/2010	7:44:01 PM	Helium valve opened
6/24/2010	7:44:04 PM	Helium MFC set to  500.000000
6/24/2010	7:47:44 PM	Helium valve closed
6/24/2010	7:48:08 PM	Helium valve opened
6/24/2010	7:52:29 PM	Helium valve closed
6/24/2010	7:53:01 PM	Helium valve opened
6/24/2010	7:59:01 PM	Helium valve closed
6/24/2010	7:59:36 PM	Helium valve opened
6/24/2010	8:03:00 PM	Helium valve closed
6/24/2010	8:03:28 PM	Helium valve opened
6/24/2010	8:06:15 PM	Helium valve closed
6/24/2010	8:07:01 PM	Helium valve opened
6/24/2010	8:14:17 PM	Helium valve closed
6/24/2010	8:15:01 PM	Helium valve opened
6/24/2010	8:23:30 PM	Helium valve closed
6/24/2010	8:24:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	8:24:24 PM	Recipe started at 8:24 PM
6/24/2010	8:24:24 PM	Helium valve closed
6/24/2010	8:24:24 PM	H2 valve closed
6/24/2010	8:24:24 PM	BCl3 valve closed
6/24/2010	8:24:24 PM	PH3 valve closed
6/24/2010	8:24:24 PM	SiCl4 pre valve closed
6/24/2010	8:24:24 PM	SiCl4 post valve closed
6/24/2010	8:24:24 PM	Main Vac valve closed
6/24/2010	8:24:24 PM	Bubbler valve closed
6/24/2010	8:24:24 PM	Bypass valve opened
6/24/2010	8:24:24 PM	Helium MFC set to  0.000000
6/24/2010	8:24:24 PM	H2 MFC set to  0.000000
6/24/2010	8:24:24 PM	BCl3 MFC set to  0.000000
6/24/2010	8:24:24 PM	PHl3 MFC set to  0.000000
6/24/2010	8:24:24 PM	SiCl4 MFC set to  0.000000
6/24/2010	8:24:24 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	8:24:24 PM	Tube furnace set to 0
6/24/2010	8:24:24 PM	Helium valve closed
6/24/2010	8:24:24 PM	H2 valve closed
6/24/2010	8:24:24 PM	BCl3 valve closed
6/24/2010	8:24:24 PM	PH3 valve closed
6/24/2010	8:24:24 PM	SiCl4 pre valve closed
6/24/2010	8:24:24 PM	SiCl4 post valve closed
6/24/2010	8:24:24 PM	Bubbler valve closed
6/24/2010	8:24:24 PM	Main Vac valve opened
6/24/2010	8:24:24 PM	Bypass valve opened
6/24/2010	8:24:24 PM	Helium MFC set to  0.000000
6/24/2010	8:24:24 PM	H2 MFC set to  0.000000
6/24/2010	8:24:24 PM	BCl3 MFC set to  0.000000
6/24/2010	8:24:24 PM	PHl3 MFC set to  0.000000
6/24/2010	8:24:24 PM	SiCl4 MFC set to  0.000000
6/24/2010	8:24:24 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	8:24:25 PM	Tube furnace set to 0
6/24/2010	8:24:25 PM	Run finished at 8:24 PM
6/24/2010	8:24:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/24/2010	10:01:27 PM	Recipe started at 10:01 PM
6/24/2010	10:01:27 PM	Helium valve closed
6/24/2010	10:01:27 PM	BCl3 valve closed
6/24/2010	10:01:27 PM	PH3 valve closed
6/24/2010	10:01:27 PM	SiCl4 pre valve closed
6/24/2010	10:01:27 PM	SiCl4 post valve closed
6/24/2010	10:01:27 PM	Main Vac valve closed
6/24/2010	10:01:27 PM	Bypass valve closed
6/24/2010	10:01:27 PM	Bubbler valve closed
6/24/2010	10:01:27 PM	H2 valve opened
6/24/2010	10:01:27 PM	Helium MFC set to  0.000000
6/24/2010	10:01:27 PM	H2 MFC set to  500.000000
6/24/2010	10:01:27 PM	BCl3 MFC set to  0.000000
6/24/2010	10:01:27 PM	PHl3 MFC set to  0.000000
6/24/2010	10:01:27 PM	SiCl4 MFC set to  0.000000
6/24/2010	10:01:27 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:01:28 PM	Tube furnace set to 1000
6/24/2010	10:02:49 PM	Helium valve closed
6/24/2010	10:02:49 PM	BCl3 valve closed
6/24/2010	10:02:49 PM	PH3 valve closed
6/24/2010	10:02:49 PM	SiCl4 pre valve closed
6/24/2010	10:02:49 PM	SiCl4 post valve closed
6/24/2010	10:02:49 PM	Main Vac valve closed
6/24/2010	10:02:49 PM	Bypass valve closed
6/24/2010	10:02:49 PM	H2 valve opened
6/24/2010	10:02:49 PM	Bubbler valve opened
6/24/2010	10:02:49 PM	Helium MFC set to  0.000000
6/24/2010	10:02:49 PM	H2 MFC set to  500.000000
6/24/2010	10:02:49 PM	BCl3 MFC set to  0.000000
6/24/2010	10:02:49 PM	PHl3 MFC set to  0.000000
6/24/2010	10:02:49 PM	SiCl4 MFC set to  0.000000
6/24/2010	10:02:49 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:02:49 PM	Tube furnace set to 1000
6/24/2010	10:22:49 PM	Helium valve closed
6/24/2010	10:22:49 PM	PH3 valve closed
6/24/2010	10:22:49 PM	Main Vac valve closed
6/24/2010	10:22:49 PM	Bypass valve closed
6/24/2010	10:22:49 PM	H2 valve opened
6/24/2010	10:22:49 PM	BCl3 valve opened
6/24/2010	10:22:49 PM	SiCl4 pre valve opened
6/24/2010	10:22:49 PM	SiCl4 post valve opened
6/24/2010	10:22:49 PM	Bubbler valve opened
6/24/2010	10:22:49 PM	Helium MFC set to  0.000000
6/24/2010	10:22:49 PM	H2 MFC set to  500.000000
6/24/2010	10:22:49 PM	BCl3 MFC set to  35.000000
6/24/2010	10:22:49 PM	PHl3 MFC set to  0.000000
6/24/2010	10:22:49 PM	SiCl4 MFC set to  50.000000
6/24/2010	10:22:49 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:22:49 PM	Tube furnace set to 1000
6/24/2010	10:27:49 PM	Helium valve closed
6/24/2010	10:27:49 PM	BCl3 valve closed
6/24/2010	10:27:49 PM	PH3 valve closed
6/24/2010	10:27:49 PM	SiCl4 pre valve closed
6/24/2010	10:27:49 PM	SiCl4 post valve closed
6/24/2010	10:27:49 PM	Main Vac valve closed
6/24/2010	10:27:49 PM	Bypass valve closed
6/24/2010	10:27:49 PM	H2 valve opened
6/24/2010	10:27:49 PM	Bubbler valve opened
6/24/2010	10:27:49 PM	Helium MFC set to  0.000000
6/24/2010	10:27:49 PM	H2 MFC set to  500.000000
6/24/2010	10:27:49 PM	BCl3 MFC set to  0.000000
6/24/2010	10:27:49 PM	PHl3 MFC set to  0.000000
6/24/2010	10:27:49 PM	SiCl4 MFC set to  0.000000
6/24/2010	10:27:49 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:27:49 PM	Tube furnace set to 750
6/24/2010	10:47:49 PM	H2 valve closed
6/24/2010	10:47:49 PM	BCl3 valve closed
6/24/2010	10:47:49 PM	PH3 valve closed
6/24/2010	10:47:49 PM	SiCl4 pre valve closed
6/24/2010	10:47:49 PM	SiCl4 post valve closed
6/24/2010	10:47:49 PM	Main Vac valve closed
6/24/2010	10:47:49 PM	Bypass valve closed
6/24/2010	10:47:49 PM	Helium valve opened
6/24/2010	10:47:49 PM	Bubbler valve opened
6/24/2010	10:47:49 PM	Helium MFC set to  500.000000
6/24/2010	10:47:49 PM	H2 MFC set to  0.000000
6/24/2010	10:47:49 PM	BCl3 MFC set to  0.000000
6/24/2010	10:47:49 PM	PHl3 MFC set to  0.000000
6/24/2010	10:47:49 PM	SiCl4 MFC set to  0.000000
6/24/2010	10:47:49 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	10:47:49 PM	Tube furnace set to 0
6/24/2010	10:56:49 PM	Run aborted at 10:56 PM
6/24/2010	10:56:49 PM	Helium valve closed
6/24/2010	10:56:49 PM	H2 valve closed
6/24/2010	10:56:49 PM	BCl3 valve closed
6/24/2010	10:56:49 PM	PH3 valve closed
6/24/2010	10:56:49 PM	SiCl4 pre valve closed
6/24/2010	10:56:49 PM	SiCl4 post valve closed
6/24/2010	10:56:49 PM	Bypass valve closed
6/24/2010	10:56:49 PM	Main Vac valve closed
6/24/2010	10:56:49 PM	Bubbler valve closed
6/24/2010	10:56:49 PM	Helium MFC set to  0.000000
6/24/2010	10:56:49 PM	H2 MFC set to  0.000000
6/24/2010	10:56:49 PM	BCl3 MFC set to  0.000000
6/24/2010	10:56:49 PM	PHl3 MFC set to  0.000000
6/24/2010	10:56:49 PM	SiCl4 MFC set to  0.000000
6/24/2010	10:56:50 PM	Tube furnace set to 0
6/24/2010	11:18:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/24/2010	11:18:46 PM	Recipe started at 11:18 PM
6/24/2010	11:18:46 PM	H2 valve closed
6/24/2010	11:18:46 PM	BCl3 valve closed
6/24/2010	11:18:46 PM	PH3 valve closed
6/24/2010	11:18:46 PM	SiCl4 pre valve closed
6/24/2010	11:18:46 PM	SiCl4 post valve closed
6/24/2010	11:18:46 PM	Main Vac valve closed
6/24/2010	11:18:46 PM	Bypass valve closed
6/24/2010	11:18:46 PM	Bubbler valve closed
6/24/2010	11:18:46 PM	Helium valve opened
6/24/2010	11:18:46 PM	Helium MFC set to  500.000000
6/24/2010	11:18:46 PM	H2 MFC set to  0.000000
6/24/2010	11:18:46 PM	BCl3 MFC set to  0.000000
6/24/2010	11:18:46 PM	PHl3 MFC set to  0.000000
6/24/2010	11:18:46 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:18:46 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:18:46 PM	Tube furnace set to 0
6/24/2010	11:18:46 PM	Helium valve closed
6/24/2010	11:18:46 PM	H2 valve closed
6/24/2010	11:18:46 PM	BCl3 valve closed
6/24/2010	11:18:46 PM	PH3 valve closed
6/24/2010	11:18:46 PM	SiCl4 pre valve closed
6/24/2010	11:18:46 PM	SiCl4 post valve closed
6/24/2010	11:18:46 PM	Main Vac valve closed
6/24/2010	11:18:46 PM	Bypass valve closed
6/24/2010	11:18:46 PM	Bubbler valve closed
6/24/2010	11:18:46 PM	Helium MFC set to  0.000000
6/24/2010	11:18:46 PM	H2 MFC set to  0.000000
6/24/2010	11:18:46 PM	BCl3 MFC set to  0.000000
6/24/2010	11:18:46 PM	PHl3 MFC set to  0.000000
6/24/2010	11:18:46 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:18:46 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:18:46 PM	Tube furnace set to 0
6/24/2010	11:18:47 PM	Run finished at 11:18 PM
6/24/2010	11:18:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/24/2010	11:18:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/24/2010	11:18:55 PM	Recipe started at 11:18 PM
6/24/2010	11:18:55 PM	H2 valve closed
6/24/2010	11:18:55 PM	BCl3 valve closed
6/24/2010	11:18:55 PM	PH3 valve closed
6/24/2010	11:18:55 PM	SiCl4 pre valve closed
6/24/2010	11:18:55 PM	SiCl4 post valve closed
6/24/2010	11:18:55 PM	Main Vac valve closed
6/24/2010	11:18:55 PM	Bypass valve closed
6/24/2010	11:18:55 PM	Bubbler valve closed
6/24/2010	11:18:55 PM	Helium valve opened
6/24/2010	11:18:55 PM	Helium MFC set to  500.000000
6/24/2010	11:18:55 PM	H2 MFC set to  0.000000
6/24/2010	11:18:55 PM	BCl3 MFC set to  0.000000
6/24/2010	11:18:55 PM	PHl3 MFC set to  0.000000
6/24/2010	11:18:55 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:18:55 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:18:55 PM	Tube furnace set to 0
6/24/2010	11:18:57 PM	Helium valve closed
6/24/2010	11:18:57 PM	H2 valve closed
6/24/2010	11:18:57 PM	BCl3 valve closed
6/24/2010	11:18:57 PM	PH3 valve closed
6/24/2010	11:18:57 PM	SiCl4 pre valve closed
6/24/2010	11:18:57 PM	SiCl4 post valve closed
6/24/2010	11:18:57 PM	Main Vac valve closed
6/24/2010	11:18:57 PM	Bypass valve closed
6/24/2010	11:18:57 PM	Bubbler valve closed
6/24/2010	11:18:57 PM	Helium MFC set to  0.000000
6/24/2010	11:18:57 PM	H2 MFC set to  0.000000
6/24/2010	11:18:57 PM	BCl3 MFC set to  0.000000
6/24/2010	11:18:57 PM	PHl3 MFC set to  0.000000
6/24/2010	11:18:57 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:18:57 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:18:57 PM	Tube furnace set to 0
6/24/2010	11:19:12 PM	Helium valve closed
6/24/2010	11:19:12 PM	H2 valve closed
6/24/2010	11:19:12 PM	BCl3 valve closed
6/24/2010	11:19:12 PM	PH3 valve closed
6/24/2010	11:19:12 PM	SiCl4 pre valve closed
6/24/2010	11:19:12 PM	SiCl4 post valve closed
6/24/2010	11:19:12 PM	Main Vac valve closed
6/24/2010	11:19:12 PM	Bubbler valve closed
6/24/2010	11:19:12 PM	Bypass valve opened
6/24/2010	11:19:12 PM	Helium MFC set to  0.000000
6/24/2010	11:19:12 PM	H2 MFC set to  0.000000
6/24/2010	11:19:12 PM	BCl3 MFC set to  0.000000
6/24/2010	11:19:12 PM	PHl3 MFC set to  0.000000
6/24/2010	11:19:12 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:19:12 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:19:12 PM	Tube furnace set to 0
6/24/2010	11:20:00 PM	Helium valve closed
6/24/2010	11:20:00 PM	H2 valve closed
6/24/2010	11:20:00 PM	BCl3 valve closed
6/24/2010	11:20:00 PM	PH3 valve closed
6/24/2010	11:20:00 PM	SiCl4 pre valve closed
6/24/2010	11:20:00 PM	SiCl4 post valve closed
6/24/2010	11:20:00 PM	Bubbler valve closed
6/24/2010	11:20:00 PM	Main Vac valve opened
6/24/2010	11:20:00 PM	Bypass valve opened
6/24/2010	11:20:00 PM	Helium MFC set to  0.000000
6/24/2010	11:20:00 PM	H2 MFC set to  0.000000
6/24/2010	11:20:00 PM	BCl3 MFC set to  0.000000
6/24/2010	11:20:00 PM	PHl3 MFC set to  0.000000
6/24/2010	11:20:00 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:20:00 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:20:00 PM	Tube furnace set to 0
6/24/2010	11:25:00 PM	H2 valve closed
6/24/2010	11:25:00 PM	BCl3 valve closed
6/24/2010	11:25:00 PM	PH3 valve closed
6/24/2010	11:25:00 PM	SiCl4 pre valve closed
6/24/2010	11:25:00 PM	SiCl4 post valve closed
6/24/2010	11:25:00 PM	Main Vac valve closed
6/24/2010	11:25:00 PM	Bypass valve closed
6/24/2010	11:25:00 PM	Bubbler valve closed
6/24/2010	11:25:00 PM	Helium valve opened
6/24/2010	11:25:00 PM	Helium MFC set to  500.000000
6/24/2010	11:25:00 PM	H2 MFC set to  0.000000
6/24/2010	11:25:00 PM	BCl3 MFC set to  0.000000
6/24/2010	11:25:00 PM	PHl3 MFC set to  0.000000
6/24/2010	11:25:00 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:25:00 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:25:00 PM	Tube furnace set to 0
6/24/2010	11:26:20 PM	Helium valve closed
6/24/2010	11:26:20 PM	H2 valve closed
6/24/2010	11:26:20 PM	BCl3 valve closed
6/24/2010	11:26:20 PM	PH3 valve closed
6/24/2010	11:26:20 PM	SiCl4 pre valve closed
6/24/2010	11:26:20 PM	SiCl4 post valve closed
6/24/2010	11:26:20 PM	Main Vac valve closed
6/24/2010	11:26:20 PM	Bypass valve closed
6/24/2010	11:26:20 PM	Bubbler valve closed
6/24/2010	11:26:20 PM	Helium MFC set to  0.000000
6/24/2010	11:26:20 PM	H2 MFC set to  0.000000
6/24/2010	11:26:20 PM	BCl3 MFC set to  0.000000
6/24/2010	11:26:20 PM	PHl3 MFC set to  0.000000
6/24/2010	11:26:20 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:26:20 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:26:20 PM	Tube furnace set to 0
6/24/2010	11:26:35 PM	Helium valve closed
6/24/2010	11:26:35 PM	H2 valve closed
6/24/2010	11:26:35 PM	BCl3 valve closed
6/24/2010	11:26:35 PM	PH3 valve closed
6/24/2010	11:26:35 PM	SiCl4 pre valve closed
6/24/2010	11:26:35 PM	SiCl4 post valve closed
6/24/2010	11:26:35 PM	Main Vac valve closed
6/24/2010	11:26:35 PM	Bubbler valve closed
6/24/2010	11:26:35 PM	Bypass valve opened
6/24/2010	11:26:35 PM	Helium MFC set to  0.000000
6/24/2010	11:26:35 PM	H2 MFC set to  0.000000
6/24/2010	11:26:35 PM	BCl3 MFC set to  0.000000
6/24/2010	11:26:35 PM	PHl3 MFC set to  0.000000
6/24/2010	11:26:35 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:26:35 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:26:35 PM	Tube furnace set to 0
6/24/2010	11:27:08 PM	Helium valve closed
6/24/2010	11:27:08 PM	H2 valve closed
6/24/2010	11:27:08 PM	BCl3 valve closed
6/24/2010	11:27:08 PM	PH3 valve closed
6/24/2010	11:27:08 PM	SiCl4 pre valve closed
6/24/2010	11:27:08 PM	SiCl4 post valve closed
6/24/2010	11:27:08 PM	Bubbler valve closed
6/24/2010	11:27:08 PM	Main Vac valve opened
6/24/2010	11:27:08 PM	Bypass valve opened
6/24/2010	11:27:08 PM	Helium MFC set to  0.000000
6/24/2010	11:27:08 PM	H2 MFC set to  0.000000
6/24/2010	11:27:08 PM	BCl3 MFC set to  0.000000
6/24/2010	11:27:08 PM	PHl3 MFC set to  0.000000
6/24/2010	11:27:08 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:27:08 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:27:08 PM	Tube furnace set to 0
6/24/2010	11:32:08 PM	H2 valve closed
6/24/2010	11:32:08 PM	BCl3 valve closed
6/24/2010	11:32:08 PM	PH3 valve closed
6/24/2010	11:32:08 PM	SiCl4 pre valve closed
6/24/2010	11:32:08 PM	SiCl4 post valve closed
6/24/2010	11:32:08 PM	Main Vac valve closed
6/24/2010	11:32:08 PM	Bypass valve closed
6/24/2010	11:32:08 PM	Bubbler valve closed
6/24/2010	11:32:08 PM	Helium valve opened
6/24/2010	11:32:08 PM	Helium MFC set to  500.000000
6/24/2010	11:32:08 PM	H2 MFC set to  0.000000
6/24/2010	11:32:08 PM	BCl3 MFC set to  0.000000
6/24/2010	11:32:08 PM	PHl3 MFC set to  0.000000
6/24/2010	11:32:08 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:32:08 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:32:08 PM	Tube furnace set to 0
6/24/2010	11:33:27 PM	Helium valve closed
6/24/2010	11:33:27 PM	H2 valve closed
6/24/2010	11:33:27 PM	BCl3 valve closed
6/24/2010	11:33:27 PM	PH3 valve closed
6/24/2010	11:33:27 PM	SiCl4 pre valve closed
6/24/2010	11:33:27 PM	SiCl4 post valve closed
6/24/2010	11:33:27 PM	Main Vac valve closed
6/24/2010	11:33:27 PM	Bypass valve closed
6/24/2010	11:33:27 PM	Bubbler valve closed
6/24/2010	11:33:27 PM	Helium MFC set to  0.000000
6/24/2010	11:33:27 PM	H2 MFC set to  0.000000
6/24/2010	11:33:27 PM	BCl3 MFC set to  0.000000
6/24/2010	11:33:27 PM	PHl3 MFC set to  0.000000
6/24/2010	11:33:27 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:33:27 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:33:27 PM	Tube furnace set to 0
6/24/2010	11:33:42 PM	Helium valve closed
6/24/2010	11:33:42 PM	H2 valve closed
6/24/2010	11:33:42 PM	BCl3 valve closed
6/24/2010	11:33:42 PM	PH3 valve closed
6/24/2010	11:33:42 PM	SiCl4 pre valve closed
6/24/2010	11:33:42 PM	SiCl4 post valve closed
6/24/2010	11:33:42 PM	Main Vac valve closed
6/24/2010	11:33:42 PM	Bubbler valve closed
6/24/2010	11:33:42 PM	Bypass valve opened
6/24/2010	11:33:42 PM	Helium MFC set to  0.000000
6/24/2010	11:33:42 PM	H2 MFC set to  0.000000
6/24/2010	11:33:42 PM	BCl3 MFC set to  0.000000
6/24/2010	11:33:42 PM	PHl3 MFC set to  0.000000
6/24/2010	11:33:42 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:33:42 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:33:42 PM	Tube furnace set to 0
6/24/2010	11:34:15 PM	Helium valve closed
6/24/2010	11:34:15 PM	H2 valve closed
6/24/2010	11:34:15 PM	BCl3 valve closed
6/24/2010	11:34:15 PM	PH3 valve closed
6/24/2010	11:34:15 PM	SiCl4 pre valve closed
6/24/2010	11:34:15 PM	SiCl4 post valve closed
6/24/2010	11:34:15 PM	Bubbler valve closed
6/24/2010	11:34:15 PM	Main Vac valve opened
6/24/2010	11:34:15 PM	Bypass valve opened
6/24/2010	11:34:15 PM	Helium MFC set to  0.000000
6/24/2010	11:34:15 PM	H2 MFC set to  0.000000
6/24/2010	11:34:15 PM	BCl3 MFC set to  0.000000
6/24/2010	11:34:15 PM	PHl3 MFC set to  0.000000
6/24/2010	11:34:15 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:34:15 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:34:15 PM	Tube furnace set to 0
6/24/2010	11:39:15 PM	Helium valve closed
6/24/2010	11:39:15 PM	H2 valve closed
6/24/2010	11:39:15 PM	BCl3 valve closed
6/24/2010	11:39:15 PM	PH3 valve closed
6/24/2010	11:39:15 PM	SiCl4 pre valve closed
6/24/2010	11:39:15 PM	SiCl4 post valve closed
6/24/2010	11:39:15 PM	Bubbler valve closed
6/24/2010	11:39:15 PM	Main Vac valve opened
6/24/2010	11:39:15 PM	Bypass valve opened
6/24/2010	11:39:15 PM	Helium MFC set to  0.000000
6/24/2010	11:39:15 PM	H2 MFC set to  0.000000
6/24/2010	11:39:15 PM	BCl3 MFC set to  0.000000
6/24/2010	11:39:15 PM	PHl3 MFC set to  0.000000
6/24/2010	11:39:15 PM	SiCl4 MFC set to  0.000000
6/24/2010	11:39:15 PM	Bypass solenoid MFC set to  0.000000
6/24/2010	11:39:15 PM	Tube furnace set to 0
6/24/2010	11:39:16 PM	Run finished at 11:39 PM
6/24/2010	11:39:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/24/2010	11:59:29 PM	Helium MFC set to  100.000000
6/24/2010	11:59:31 PM	Helium valve opened
